Flexibility of Beneq TFS 500 ALD reactor:
- Modular construction
- Several reaction chamber types available – easy to change
- Suitable sources for all precursors
- Easy upgrading and later modifications
- Fully configurable recipes
- Large reaction space with small foot print
- Compact source constructions
- All daily operations above waistline
- No out-hanging components
- All chemicals in ventilated hood
- Over-pressure safe vacuum chamber construction
- Easy access for maintenance
- Good visibility to all connections
- All cover sheets easy to open
- Hinged back flange with heaters on sliding rails
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